Reconfigurable Si-based Active Metasurface with Ultra Low Loss and Crosstalk for LiDAR

Recently, we have demonstrated a solid-state spatial light modulator (SLM) with a plasmonic antenna array, and this has attracted substantial interest due to its excellent modulation performance and potential use in beam shaping. Despite of its huge advantage - independently controlled magnitude and...

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Bibliographic Details
Main Authors: Jeong, Byung Gil, Park, Junghyun, Kim, Sun Il, Lee, Minkyung, Jang, Jaeduck, Ha, Kyoungho, Choo, Hyuck
Format: Conference Proceeding
Language:English
Subjects:
Optical resonators
Optical variables measurement
Phase modulation
Reflectivity
Temperature distribution
Temperature measurement
Voltage measurement
Online Access:Request full text
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Summary:Recently, we have demonstrated a solid-state spatial light modulator (SLM) with a plasmonic antenna array, and this has attracted substantial interest due to its excellent modulation performance and potential use in beam shaping. Despite of its huge advantage - independently controlled magnitude and phase of light that allows versatile optical scan -, its very low reflection efficiency makes it unsuitable for real-world applications. In this paper, we have demonstrated a Si-based SLM design using asymmetric resonator composed of p-i-n diode structure and distributed Bragg reflector. We obtained experimentally the world-record reflection efficiency over 50% and the phase modulation of 300°. We also measured the maximum side-mode-suppression-ratio of 10.53 dB, also the world record, with a clean far-field pattern, excellent SNR, and steering capability.
ISSN:2156-017X
DOI:10.1109/IEDM19574.2021.9720580