A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution

This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as wel...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2022-06, Vol.31 (3), p.402-407
Main Authors: Wang, Yuan, Song, Xiaoxiao, Xi, Jingqian, Li, Fangzheng, Xu, Lei, Liu, Huafeng, Wang, Chen, Kuang, Shuangyang, Tu, Liang-Cheng, Kraft, Michael, Zhao, Chun
Format: Article
Language:English
Subjects:
Actuation
Amplitude modulation
Blue-sideband actuation
Cavity resonators
double-ended tuning fork
Frequency modulation
Lorentz covariance
Lorentz force
Magnetic fields
Magnetic hysteresis
Magnetic resonance
magnetometer
Magnetometers
Q-factor
Sensitivity
Sensitivity enhancement
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Summary:This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 \mu \text{V}/\surd Hz, and a resolution of 0.23 pN/ \surd Hz. In comparison with a conventional drive scheme, the blue-sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications. [2022-0018]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2022.3162015