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Soft Error Characterization of D-FFs at the 5-nm Bulk FinFET Technology for the Terrestrial Environment

Soft error rates (SER) are characterized for the 5-nm bulk FinFET D flip-flops for alpha particles, thermal neutrons, and high-energy neutrons as a function of supply voltage. At nominal operating voltage, the 5-nm node has higher SER than the 7-nm node for all three particle types, with increases o...

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Bibliographic Details
Main Authors: Xiong, Y., Feeley, A., Pieper, N. J., Ball, D. R., Narasimham, B., Brockman, J., Dodds, N. A., Wender, S. A., Wen, S. -J., Fung, R., Bhuva, B. L.
Format: Conference Proceeding
Language:English
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Summary:Soft error rates (SER) are characterized for the 5-nm bulk FinFET D flip-flops for alpha particles, thermal neutrons, and high-energy neutrons as a function of supply voltage. At nominal operating voltage, the 5-nm node has higher SER than the 7-nm node for all three particle types, with increases of 148%, 168%, and 26%, respectively. The overall SER for the 5-nm node was ~2X greater than that of the 7-nm node, because the reduction in critical charge was higher than that in collected charge. For alpha particle exposures, temperature effects on SER were more prominent for the 5-nm node than both the 7-nm and 16-nm node. Relative contribution of alpha particle SER increases with scaling, and it accounts for 13% of the overall SER at the 5-nm node.
ISSN:1938-1891
DOI:10.1109/IRPS48227.2022.9764523