An embedded NORST flash memory technology

A NORST (NOR flash memory with a select-transistor) flash memory cell technology, which features a single 5 V power supply, a small cell size of 14.88 um/sup 2/ and a good reliability, is demonstrated suitable for the embedded application under 1 Mbit. It can work with byte erasing mode or sector er...

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Bibliographic Details
Main Authors: Pan Liyang, Liu Kai, Zeng Ying, Guo Yinzi, Zhu Jun
Format: Conference Proceeding
Language:English
Subjects:
Channel hot electron injection
CMOS process
CMOS technology
Flash memory
Flash memory cells
Logic arrays
Microelectronics
Nonvolatile memory
Threshold voltage
Tunneling
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Description
Summary:A NORST (NOR flash memory with a select-transistor) flash memory cell technology, which features a single 5 V power supply, a small cell size of 14.88 um/sup 2/ and a good reliability, is demonstrated suitable for the embedded application under 1 Mbit. It can work with byte erasing mode or sector erasing mode according to different embedded memory systems, and has a good reliability. An embedded memory system and its process technology, as well as the process result, is described.
DOI:10.1109/ICSICT.2001.981459