ZnO-based Acoustofluidics: Droplet-based Particle Manipulation

Droplet microfluidics as a cost-effective and precise branch of microfluidics provides shorter time analyses than the continuous-flow branch. This feature, along with a smaller amount of sample has attracted a large number of researchers. Here, a droplet-based Acoustofluidics platform is developed t...

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Bibliographic Details
Main Authors: Abbasi, Sara, Barahimi, Behdad, Darbari, Sara, Moravvej-Farshi, Mohammad Kazem, Zabetian, Mohammad
Format: Conference Proceeding
Language:English
Subjects:
acoustofluidics
Aluminum
Force
II-VI semiconductor materials
particle manipulation
standing surface acoustic wave
Surface acoustic wave devices
Surface acoustic waves
Transducers
travelling surface acoustic wave
Zinc oxide
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Summary:Droplet microfluidics as a cost-effective and precise branch of microfluidics provides shorter time analyses than the continuous-flow branch. This feature, along with a smaller amount of sample has attracted a large number of researchers. Here, a droplet-based Acoustofluidics platform is developed to investigate the imposed travelling surface acoustic wave (TSAW) and standing surface acoustic wave (SSAW) influence on polystyrene (PS) microbeads that are dispersed in a deionized water droplet. Aluminum interdigital transducers (IDTs) are patterned through a lift-off process over the zinc oxide (ZnO) thin film; the ZnO thin film serves as the piezoelectric layer which is RF sputtered on silicon oxide- silicon substrate. By tracing the PS microparticles motion, the effect of interacting forces in both TSAW and SSAW regimes is investigated and the formation of acoustic streaming vortices is shown.
ISSN:2642-9527
DOI:10.1109/ICEE55646.2022.9827267