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Atomic visualization of the emergence of orthorhombic phase in Hf0.5Zr0.5O2 ferroelectric film with in-situ rapid thermal annealing

For the first time, the dynamic process of orthorhombic (o-) phase emergence during rapid thermal annealing in polycrystalline Hf 0.5 Zr 0.5 O 2 (HZO) ferroelectric film was directly visualized though in-situ spherical aberration corrected transmission electron microscopy technique. We have the foll...

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Bibliographic Details
Main Authors: Xin, Tianjiao, Zheng, Yonghui, Cheng, Yan, Du, Kai, Wang, Yiwei, Gao, Zhaomeng, Su, Diqing, Zheng, Yunzhe, Zhong, Qilan, Liu, Cheng, Huang, Rong, Duan, Chungang, Song, Sannian, Song, Zhitang, Lyu, Hangbing
Format: Conference Proceeding
Language:English
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Summary:For the first time, the dynamic process of orthorhombic (o-) phase emergence during rapid thermal annealing in polycrystalline Hf 0.5 Zr 0.5 O 2 (HZO) ferroelectric film was directly visualized though in-situ spherical aberration corrected transmission electron microscopy technique. We have the following main observations: (1) o-phase nucleates from centrosymmetric tetragonal (t-) phase at top TiN/HZO interface where the oxygen vacancy (Vo) concentration is rich, identifying that Vo is helpful to lower the free energy of o-phase; (2) o-phase appears in both heating up and cooling down stages. The o-phase formed in the heating stage rapidly transforms into t-phase again as the temperature further increasing, and the one formed in the cooling stage is retained. These findings provide solid evidence on the o-phase origin in fluorite-type ferroelectric materials.
ISSN:2158-9682
DOI:10.1109/VLSITechnologyandCir46769.2022.9830185