Surface Emitting Ring Quantum-cascade Lasers made by Focused Ion Beam Milling

The results on the fabrication and studies of ring quantum-cascade lasers with light output through a second-order diffraction grating are presented. The grating was formed over the entire surface of the ring cavity by the focused ion beam milling. Lasing in vertical direction to surface was observe...

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Bibliographic Details
Main Authors: Babichev, A.V., Mikhailov, D.A., Kolodeznyi, E.S., Gladyshev, A.G., Voznyuk, G.V., Mitrofanov, M.I., Slipchenko, S.O., Lyutetskii, A.V., Dudelev, V.V., Evtikhiev, V.P., Karachinsky, L. Ya, Novikov, I.I., Sokolovskii, G.S., Pikhtin, N.A., Egorov, A. Yu
Format: Conference Proceeding
Language:English
Subjects:
Epitaxial growth
Fabrication
Indium
indium phosphide
Laser beams
Milling
molecular-beam epitaxy
Optics
QCL
ring cavity
Ring lasers
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Summary:The results on the fabrication and studies of ring quantum-cascade lasers with light output through a second-order diffraction grating are presented. The grating was formed over the entire surface of the ring cavity by the focused ion beam milling. Lasing in vertical direction to surface was observed near 7.75\ \mu \mathrm{m} at room temperature.
ISSN:2642-5580
DOI:10.1109/ICLO54117.2022.9840033