Microlens fabrication by the modified LIGA process

A microlens or microlenses array has been fabricated by a novel fabrication technology which is based upon a deep X-ray exposure and a thermal treatment of a resist, usually PMMA. The fabrication technology is very simple and produces the microlenses array as well as the microlens which has good sur...

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Bibliographic Details
Main Authors: Sung-Keun Lee, Kwang-Cheol Lee, Lee, S.S.
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Fabrication
Fundamental areas of phenomenology (including applications)
Heat treatment
Lenses
Micro- and nanoelectromechanical devices (mems/nems)
Microoptics
Optical elements, devices, and systems
Optics
Physics
Resists
Rough surfaces
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Surface roughness
Surface treatment
Temperature
Thermal resistance
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Summary:A microlens or microlenses array has been fabricated by a novel fabrication technology which is based upon a deep X-ray exposure and a thermal treatment of a resist, usually PMMA. The fabrication technology is very simple and produces the microlenses array as well as the microlens which has good surface roughness less than I nm. Molecular weight and glass transition temperature of PMMA is reduced when it is exposed to the deep X-ray. The microlens is produced through the effect of surface tension and reflow by applying the thermal treatment on the irradiated PMMA. A configuration of the microlens is determined by parameters such as absorbed X-ray dose on PMMA, heating temperature, and heating time in the thermal treatment. Diameters of the produced microlens range from 30 /spl mu/m to 1500 /spl mu/m and their heights vary between 10 /spl mu/m and 25 /spl mu/m.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2002.984323