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Slow-Wave MEMS phase shifter with Liquid Crystal for Reconfigurable 5G
Antenna beamforming is crucial for the development of 5G technology in the millimeter wave region and typical beamforming configuration uses phased arrays devices. For this reason, the development of phase shifters devices with low-cost, small footprint and high Figure of Merit (FoM) is necessary. I...
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creator | Gomes, Leonardo Wang, Dongwei Palomino, Gustavo Le, Joao Jakoby, Rolf Maune, Holger Ferrari, Philippe Serrano, Ariana L.C. Rehder, Gustavo P. |
description | Antenna beamforming is crucial for the development of 5G technology in the millimeter wave region and typical beamforming configuration uses phased arrays devices. For this reason, the development of phase shifters devices with low-cost, small footprint and high Figure of Merit (FoM) is necessary. In this paper, we present a slow-wave phase shifter based on a nanoporous alumina interposer, MEMS and liquid crystal (LC) for 5G mmW base station beamforming applications. The slow-wave line allows a device miniaturization, while the liquid crystal increases the phase shift and reduces the MEMS actuation voltage. A FoM of 42°/dB and 66 º/dB was obtained at 24 GHz and 40 GHz, with a maximum biasing voltage of 50 V and a footprint of 0.13 mm 2 . This device is a prime candidate for phased array antenna applications on 5G and future 6G base stations. |
doi_str_mv | 10.1109/IMS37962.2022.9865403 |
format | conference_proceeding |
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For this reason, the development of phase shifters devices with low-cost, small footprint and high Figure of Merit (FoM) is necessary. In this paper, we present a slow-wave phase shifter based on a nanoporous alumina interposer, MEMS and liquid crystal (LC) for 5G mmW base station beamforming applications. The slow-wave line allows a device miniaturization, while the liquid crystal increases the phase shift and reduces the MEMS actuation voltage. A FoM of 42°/dB and 66 º/dB was obtained at 24 GHz and 40 GHz, with a maximum biasing voltage of 50 V and a footprint of 0.13 mm 2 . 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For this reason, the development of phase shifters devices with low-cost, small footprint and high Figure of Merit (FoM) is necessary. In this paper, we present a slow-wave phase shifter based on a nanoporous alumina interposer, MEMS and liquid crystal (LC) for 5G mmW base station beamforming applications. The slow-wave line allows a device miniaturization, while the liquid crystal increases the phase shift and reduces the MEMS actuation voltage. A FoM of 42°/dB and 66 º/dB was obtained at 24 GHz and 40 GHz, with a maximum biasing voltage of 50 V and a footprint of 0.13 mm 2 . This device is a prime candidate for phased array antenna applications on 5G and future 6G base stations.</description><subject>5G mobile communication</subject><subject>Array signal processing</subject><subject>Base stations</subject><subject>Cutoff frequency</subject><subject>Micromechanical devices</subject><subject>mmW MEMS</subject><subject>Phased arrays</subject><subject>tunable</subject><subject>Voltage measurement</subject><issn>2576-7216</issn><isbn>1665496134</isbn><isbn>9781665496131</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2022</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><recordid>eNotj91KwzAYQKMguE2fQIS8QGt-mi_JpZT9QYtgFS9H2n2xkepm0jn29gru6pyrA4eQe85yzpl9WNeN1BZELpgQuTWgCiYvyJTDn1ngsrgkE6E0ZFpwuCbTlD4YY8pwmJBFM-yO2Zv7QVrP64bue5eQpj74ESM9hrGnVfg-hC0t4ymNbqB-F-kzdrsvH94P0bUDUrW8IVfeDQlvz5yR18X8pVxl1dNyXT5WWc9Bj5k3WiurjUBQ205I7gCtZ8waI7RpDSs6j76zUhjrObCuhcKawjjrlWHcyhm5--8GRNzsY_h08bQ5P8tfOMFJ9w</recordid><startdate>20220619</startdate><enddate>20220619</enddate><creator>Gomes, Leonardo</creator><creator>Wang, Dongwei</creator><creator>Palomino, Gustavo</creator><creator>Le, Joao</creator><creator>Jakoby, Rolf</creator><creator>Maune, Holger</creator><creator>Ferrari, Philippe</creator><creator>Serrano, Ariana L.C.</creator><creator>Rehder, Gustavo P.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>20220619</creationdate><title>Slow-Wave MEMS phase shifter with Liquid Crystal for Reconfigurable 5G</title><author>Gomes, Leonardo ; Wang, Dongwei ; Palomino, Gustavo ; Le, Joao ; Jakoby, Rolf ; Maune, Holger ; Ferrari, Philippe ; Serrano, Ariana L.C. ; Rehder, Gustavo P.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-h167t-f87759782e65dc231a6e9f00988278b804cfefc93289f160cb649848a9f580193</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2022</creationdate><topic>5G mobile communication</topic><topic>Array signal processing</topic><topic>Base stations</topic><topic>Cutoff frequency</topic><topic>Micromechanical devices</topic><topic>mmW MEMS</topic><topic>Phased arrays</topic><topic>tunable</topic><topic>Voltage measurement</topic><toplevel>online_resources</toplevel><creatorcontrib>Gomes, Leonardo</creatorcontrib><creatorcontrib>Wang, Dongwei</creatorcontrib><creatorcontrib>Palomino, Gustavo</creatorcontrib><creatorcontrib>Le, Joao</creatorcontrib><creatorcontrib>Jakoby, Rolf</creatorcontrib><creatorcontrib>Maune, Holger</creatorcontrib><creatorcontrib>Ferrari, Philippe</creatorcontrib><creatorcontrib>Serrano, Ariana L.C.</creatorcontrib><creatorcontrib>Rehder, Gustavo P.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEL</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Gomes, Leonardo</au><au>Wang, Dongwei</au><au>Palomino, Gustavo</au><au>Le, Joao</au><au>Jakoby, Rolf</au><au>Maune, Holger</au><au>Ferrari, Philippe</au><au>Serrano, Ariana L.C.</au><au>Rehder, Gustavo P.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Slow-Wave MEMS phase shifter with Liquid Crystal for Reconfigurable 5G</atitle><btitle>2022 IEEE/MTT-S International Microwave Symposium - IMS 2022</btitle><stitle>IMS</stitle><date>2022-06-19</date><risdate>2022</risdate><spage>983</spage><epage>986</epage><pages>983-986</pages><eissn>2576-7216</eissn><eisbn>1665496134</eisbn><eisbn>9781665496131</eisbn><abstract>Antenna beamforming is crucial for the development of 5G technology in the millimeter wave region and typical beamforming configuration uses phased arrays devices. For this reason, the development of phase shifters devices with low-cost, small footprint and high Figure of Merit (FoM) is necessary. In this paper, we present a slow-wave phase shifter based on a nanoporous alumina interposer, MEMS and liquid crystal (LC) for 5G mmW base station beamforming applications. The slow-wave line allows a device miniaturization, while the liquid crystal increases the phase shift and reduces the MEMS actuation voltage. A FoM of 42°/dB and 66 º/dB was obtained at 24 GHz and 40 GHz, with a maximum biasing voltage of 50 V and a footprint of 0.13 mm 2 . This device is a prime candidate for phased array antenna applications on 5G and future 6G base stations.</abstract><pub>IEEE</pub><doi>10.1109/IMS37962.2022.9865403</doi><tpages>4</tpages></addata></record> |
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subjects | 5G mobile communication Array signal processing Base stations Cutoff frequency Micromechanical devices mmW MEMS Phased arrays tunable Voltage measurement |
title | Slow-Wave MEMS phase shifter with Liquid Crystal for Reconfigurable 5G |
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