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Data-driven doping reconstruction
To reconstruct doping profiles via opto-electronic techniques (e.g. LBIC and LPS), we formulate an inverse problem based on the van Roosbroeck system. To solve it, we use neural networks fed with data created from efficient implementations of the forward model. We discuss errors of the reconstructed...
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Main Authors: | , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | To reconstruct doping profiles via opto-electronic techniques (e.g. LBIC and LPS), we formulate an inverse problem based on the van Roosbroeck system. To solve it, we use neural networks fed with data created from efficient implementations of the forward model. We discuss errors of the reconstructed doping profiles as well as their robustness with respect to noise. |
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ISSN: | 2158-3234 |
DOI: | 10.1109/NUSOD54938.2022.9894774 |