A Novel Terahertz Integrated Sensor Based on Metamaterial and Embedded Microfluidic Channels

THz metamaterial microfluidic sensors, which can be utilized for the detection of liquid specimen, have attracted much attention in biosensing applications. In this paper, a novel microfluidic channel embedded THz metamaterial sensor is proposed and characterized. Unlike the reported THz metamateria...

Full description

Saved in:
Bibliographic Details
Main Authors: Li, Xue, Deng, Tao, Jiao, Hengyuan, Zhu, Mingqiang, Sun, Jingye
Format: Conference Proceeding
Language:English
Subjects:
Biosensors
Metamaterials
Q-factor
Reflection
Sensitivity
Sensor phenomena and characterization
Simulation
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:THz metamaterial microfluidic sensors, which can be utilized for the detection of liquid specimen, have attracted much attention in biosensing applications. In this paper, a novel microfluidic channel embedded THz metamaterial sensor is proposed and characterized. Unlike the reported THz metamaterial microfluidic sensors, our concept combines the microfluidic channel with substrate, by designing micro-channels in PDMS substrate. It could be easily fabricated by standard photolithography technique. We also compare and contrast the transmission and reflection performance of different SRR metamaterials. The simulation results show that the two-gap SRR pattern with 120° spacing angle exhibits highest sensitivity, FOM and Q-factor.
ISSN:2162-2035
DOI:10.1109/IRMMW-THz50927.2022.9895669