Single-chip surface-micromachined integrated gyroscope with 50/spl deg//hour root allan variance

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Bibliographic Details
Main Authors: Geen, J.A., Sherman, S.J., Chang, J.F., Lewis, S.R.
Format: Conference Proceeding
Language:English
Subjects:
Costs
Electrostatic actuators
FETs
Gyroscopes
Low-frequency noise
Packaging
Pulse amplifiers
Resistors
Switches
White noise
Online Access:Request full text
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DOI:10.1109/ISSCC.2002.992288