Transfer-Printed Photonic Crystal Nanobeam Laser with Unidirectional Coupling to SiNx Waveguide

We propose and study the hybrid integration of a 1D photonic crystal (PhC) nanobeam (NB) laser on a SiN x waveguide. With modifications by reduced-PhCs and a tapered beam to the NB laser, this integration can exhibit over 50% directional coupling to the specific waveguide output facet while maintain...

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Bibliographic Details
Published in:Journal of lightwave technology 2023-03, Vol.41 (5), p.1-9
Main Authors: Lu, Tsan-Wen, Wang, Jing-Ting, Lin, Yu-Cheng, Lee, Po-Tsung
Format: Article
Language:English
Subjects:
Coupling
Emission
hybrid integration
Integrated circuits
Lasers
Lasing
nanocavity
nanolasers
Photonic crystals
semiconductor lasers
SiN<sub xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">x waveguides
Transfer printing
Waveguides
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Summary:We propose and study the hybrid integration of a 1D photonic crystal (PhC) nanobeam (NB) laser on a SiN x waveguide. With modifications by reduced-PhCs and a tapered beam to the NB laser, this integration can exhibit over 50% directional coupling to the specific waveguide output facet while maintaining a sufficient quality factor for low-threshold lasing. Using the transfer printing technique, we realized the proposed hybrid integration with optimized parameters, which showed significant planar laser emission from the SiN x waveguide facet in experiments while maintaining a low lasing threshold of 180 μW. In addition to verifying the unidirectionality of planar emission by simulation and experimental results, we further confirm its robustness by characterizing many transfer-printed NB lasers on SiN x waveguides under generally occurring displacement and rotational misalignments in the present transfer printing systems. We believe that the hybrid integration with compact size, unidirectional coupling, and low lasing threshold demonstrated herein can provide a helpful reference for designing PhC NB lasers coupled with SiN x waveguides in silicon-based photonic integrated circuits.
ISSN:0733-8724
1558-2213
DOI:10.1109/JLT.2022.3224742