Miniaturized Wet-Wet Differential Pressure Sensor

We report a miniaturized wet-wet differential pressure sensor with applications in pressure and flow sensing in water networks and other harsh environments. The device is similar in concept to a conventional wet-wet differential pressure sensor in that the sensing element is protected from the exter...

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Bibliographic Details
Main Authors: Holmes, A.S., Yang, S.K.E., Kiziroglou, M.E., Boyle, D.E., Lincoln, D.M., McCabe, J.D.J., Szasz, P., Williams, D.R., Yeatman, E.M.
Format: Conference Proceeding
Language:English
Subjects:
corrugated diaphragm
delta-pressure flow sensor
Microfabrication
Micromachining
Performance evaluation
Pressure sensors
Temperature distribution
Temperature sensors
Thermal stability
wet-wet pressure sensor
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Summary:We report a miniaturized wet-wet differential pressure sensor with applications in pressure and flow sensing in water networks and other harsh environments. The device is similar in concept to a conventional wet-wet differential pressure sensor in that the sensing element is protected from the external environment by oil-filled cavities closed off by corrugated diaphragms. However, with a package envelope of 11.0 x 4.8 x 3.4 mm 3 , corresponding to a volume of only 0.18 cm 3 , the device is considerably smaller than commercially available wet-wet differential pressure sensors. A high degree of miniaturization has been achieved by using micromachining to fabricate the corrugated diaphragms. Preliminary experimental results are presented showing operation of the device as a delta-pressure flow speed sensor in a water flow test rig.
ISSN:2168-9229
DOI:10.1109/SENSORS52175.2022.9967161