Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips

By establishing and exploring a numeric model of an acoustofluidic device driven by a piezoelectric plate transducer, we discovered simple and distinct vibrational patterns with high displacement amplitudes for a lateral vibrational mode of the transducer plate. With the design based on a numericall...

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Bibliographic Details
Main Authors: Fuchsluger, Andreas, De Pastina, Annalisa, Cselyuszka, Norbert, Andrianov, Nikolai, Roshanghias, Ali, Mitteramskogler, Tina, Ecker, Rafael, Voglhuber-Brunnmaier, Thomas, Moridi, Mohssen, Jakoby, Bernhard
Format: Conference Proceeding
Language:English
Subjects:
Acoustics
acoustofluidics
Fluids
Focusing
Harmonic analysis
Heating systems
lateral modes
microfluidics
numeric optimization
particle focusing
plate transducer
roof-modes
Sensors
Transducers
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Summary:By establishing and exploring a numeric model of an acoustofluidic device driven by a piezoelectric plate transducer, we discovered simple and distinct vibrational patterns with high displacement amplitudes for a lateral vibrational mode of the transducer plate. With the design based on a numerically optimized chip-geometry for this particular lateral mode, we fabricated high-performant chips enabling rapid and accurate particle focusing, where the acoustic energy density is exceeding 100 J/m 3 at actuation frequencies around 540 kHz, while heat generation remains low. We excite higher order harmonics leading to multiple separate lines of particles along the channel. With the custom-made chip holder featuring integrated fluid connections and transducer support, we are moreover able to swiftly mount microfluidic chips directly after dicing without any further preparation.
ISSN:2168-9229
DOI:10.1109/SENSORS52175.2022.9967272