MEMS-based piezoelectric BAW resonator based on out-of-plane degenerate mode for micro angular detector

• Published in: Electronics letters 2013-03, Vol.49 (6), p.406-407
• Main Authors: Cheng, Y.X, Zhang, W.P, Guan, R, Zhang, G, Xu, Z.X, Chen, W.Y
• Format: Article
• Language: English
• Subjects: acoustic resonators; Acoustic wave devices, piezoelectric and piezoresistive devices; angular measurement; Applied sciences; bulk acoustic wave devices; crystal resonators; device assembly; device fabrication; driving efficiency enhancement; Electronics; Exact sciences and technology; General equipment and techniques; impedance analyser; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical instruments, equipment and techniques; MEMS‐based piezoelectric BAW resonator; microangular detector; microassembling; microelectromechanical piezoelectric concentrated‐mass bulk acoustic wave resonator; microfabrication; Micromechanical devices and systems; microsensors; Organic and inorganic circuits and devices; out‐of‐plane degenerate mode; Physics; PZT; PZT resonator; quality factor; Q‐factor; resonant frequency; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; sensing efficiency enhancement; sensor resolution; signal quality; Transducers
• ISSN: 0013-5194; 1350-911X; 1350-911X
• DOI: 10.1049/el.2012.4293

A novel microelectromechanical piezoelectric concentrated-mass bulk acoustic wave (BAW) resonator based on out-of-plane degenerate mode is proposed for detecting micro angles. A PZT resonator with a concentrated-mass is designed to enhance the driving and sensing efficiency. The device combines the bulk acoustic wave drive/sense with a rocking concentrated mass to increase the resonant frequency, the signal quality and the resolution of the sensor. A 10 × 10 mm device has been fabricated and assembled by the microelectromechanical system process and the traditional mechanical process. The test results measured by the impedance analyser in air show that the resonant frequency and the quality factor of this device are about 174 kHz and 110, respectively. Moreover, the frequency split is only about 200Hz without any tuning methods.