Chemical solution deposition (CSD) and characterization of the solid solution series Ba(1−x)Pbx(Ti, Mn)O3

In this contribution, Ba( 1−x )Pb x (Ti, Mn)O 3 (BPT) and its properties will be presented. BPT has been synthesized using CSD based on metal propionates. The films were deposited on platinum covered silicon wafers with a spin-on technique. To convert the amorphous films into the BPT ceramic an anne...

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Bibliographic Details
Published in:Ferroelectrics 1999-03, Vol.225 (1), p.117-123
Main Authors: Bolten, Dierk, Hoffmann, Marcus, Hasenkox, Ulrich, Lohse, Oliver, Waser, Rainer
Format: Article
Language:English
Subjects:
ferroelectric properties
Sol-gel process
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Summary:In this contribution, Ba( 1−x )Pb x (Ti, Mn)O 3 (BPT) and its properties will be presented. BPT has been synthesized using CSD based on metal propionates. The films were deposited on platinum covered silicon wafers with a spin-on technique. To convert the amorphous films into the BPT ceramic an annealing at 750°C was performed. The BPT thin films were characterized with X-ray diffraction and SEM. A platinum electrode was sputtered on top of the BPT thin film to obtain capacitor structures. Hysteresis, C-V measurements and leakage current measurements were used to investigate the effect of Pb substitution on the electrical properties of the film.
ISSN:0015-0193
1563-5112
DOI:10.1080/00150199908009118