Some leakage current observations on anodic native oxides on GaAs

Leakage current measurements across MOS diodes with native electrolytic nsidesevhibit a behaviour which is tentatively explained on the basis of the effect of non-oxidized As traps near the interface in the oxide,

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Bibliographic Details
Published in:International journal of electronics 1979-12, Vol.47 (6), p.599-602
Main Authors: MATHUR, P C., DAWAR, A. L., TANEJA, O P., HARTNAGEL, H. L.
Format: Article
Language:English
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Description
Summary:Leakage current measurements across MOS diodes with native electrolytic nsidesevhibit a behaviour which is tentatively explained on the basis of the effect of non-oxidized As traps near the interface in the oxide,
ISSN:0020-7217
1362-3060
DOI:10.1080/00207217908938685