The influence of synthesis temperature on structure properties of SrTiO3 ferroelectric films

The results of structure investigations of SrTiO 3 films depending on synthesis temperature are presented and electrical characteristics of 4-electrode planar capacitors based on prepared films are investigated. Finally, the technological conditions of high structure quality SrTiO 3 films preparatio...

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Bibliographic Details
Main Authors: Loginov, V. E., Tumarkin, A. V., Sysa, M. V., Buslov, O. U., Gaidukov, M. M., Ivanov, A. I., Kozyrev, A. B.
Format: Conference Proceeding
Language:English
Online Access:Get full text
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Summary:The results of structure investigations of SrTiO 3 films depending on synthesis temperature are presented and electrical characteristics of 4-electrode planar capacitors based on prepared films are investigated. Finally, the technological conditions of high structure quality SrTiO 3 films preparation are determined. SrTiO 3 films prepared under these conditions possess electrical characteristics sufficient for room temperature MW applications in a wide frequency range., Keywords: RF magnetron sputtering, SrTiO 3
ISSN:1058-4587
1607-8489
DOI:10.1080/10584580108011961