Preparation and Characterization of Organic-Inorganic Hybrid Materials Via Sol-Gel Reaction for Interlayer Dielectrics

• Published in: Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals Molecular crystals and liquid crystals, 2000-09, Vol.349 (1), p.263-266
• Main Authors: Baek, Nam Seob, Song, Young-Bae, Kim, Hwan Kyu, Hwang, Seung Sang, Hong, Soon Man
• Format: Article
• Language: English
• Subjects: Applied sciences; Exact sciences and technology; interlayer dielectrics; Organic polymers; organic/inorganic hybrid materials; Physicochemistry of polymers; poly(hydroxy-imide); Polycondensation; Preparation, kinetics, thermodynamics, mechanism and catalysts; thermal expansion coefficient
• ISSN: 1058-725X
• DOI: 10.1080/10587250008024915

Polyimides containing hydroxyl group, so-called poly(hydroxy-imide)s, were prepared by the thermal imidization in the presence of m-cresol. The poly(hydroxy-imide)s exhibited high resistance to thermal degradation, with 10% weight loss temperature starting at near 527°C in air. The organic/inorganic hybrid materials were prepared with TEOS by acid-catalyzed sol-gel reaction of sol-gel polyimide precursors obtained from the coupling reaction of the poly(hydroxy-imide) with 3-(triethoxysilyl)propyl isocyanate. All of the cured hybrid films spin-coated on ITO glass are transparent. The initial decomposition temperature was recorded at 356°C. The dielectric constant of a hybrid material film was 3.24 at the frequency of 10kHz. The hybrid materials retained the coefficient of thermal expansion up to 3 ppm/°C below Tg and 30 ppm/°C above Tg.