Vertical Alignment of Liquid Crystal on a-SiON Thin Film Exposed by Ion Beam

We study the properties of the vertical alignment of liquid crystal on amorphous SiON (a-SiON) thin film exposed by ion beam. a-SiON thin films are deposited on the indium-tin-oxide coated glass substrates by using radio-frequency magnetron sputtering system in the temperature range from 25 to 400°C...

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Bibliographic Details
Published in:Molecular Crystals and Liquid Crystals 2009-01, Vol.507 (1), p.307-315
Main Authors: Hwang, Soo-Won, Jo, Bong-Kyun, Yoon, Tae-Hoon, Kim, Jae Chang
Format: Article
Language:English
Subjects:
Contact angle
ion beam
Ion beams
liquid crystal display
Liquid crystal polymers
Silicon
SiON
Surface roughness
Temperature
Thin films
vertical alignment
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Summary:We study the properties of the vertical alignment of liquid crystal on amorphous SiON (a-SiON) thin film exposed by ion beam. a-SiON thin films are deposited on the indium-tin-oxide coated glass substrates by using radio-frequency magnetron sputtering system in the temperature range from 25 to 400°C. The transmittance and surface roughness of a-SiON thin films are enhanced with the increase in deposition temperature. After the substrates were deposited by sputtering system, we exposed them to ion beam and fabricated vertical alignment liquid crystal cells. As a result, the fabricated liquid crystal cells show uniform pretilt angle range from 88 to 89° and high thermal stability over 100°C for 20 hours.
ISSN:1542-1406
1563-5287
1527-1943
DOI:10.1080/15421400903054147