Investigation on anti-reflection property of nitrogen doped diamond-like carbon (DLC) films produced by RF magnetron sputtering

• Published in: Molecular crystals and liquid crystals (Philadelphia, Pa. : 2003) Pa. : 2003), 2002-01, Vol.386 (1), p.61-66
• Main Authors: Vinod, P. R., Kakiuchi, H., Terai, T., Itakura, A. N., Kitajima, M.
• Format: Article
• Language: English
• ISSN: 1542-1406; 1563-5287
• DOI: 10.1080/713738805

Nitrogen doped Diamond-like carbon thin films were deposited on n-Si and SiO 2 substrates by rf magnetron sputtering using pure graphite (99.999%) as the target material and mixtures of Ar, N 2 and H 2 for plasma generation. The dependence of structural and optical properties on nitrogen content was investigated using XPS, Raman spectroscopy, FT-IR spectroscopy, and Ellipsometry studies. It was found that as the nitrogen content was increased in the plasma, sp 2 bonding favored. Also it was observed that oxygen contamination increased with nitrogen content. Typical C-H stretching modes connected with diamond-like carbon could be seen in FT-IR spectra. The D and G bands were well defined and it was observed that as nitrogen content increased G band was enhanced. Ellipsometry studies revealed that the optical constants like refractive index (n) and extinction co-efficient (k) increased with increase in nitrogen content as well as substrate temperature.