Yig Thin Film used to Miniaturize a Coplanar Junction Circulator

The preparation of Yttrium Iron Garnet films (YIG) presenting controlled magnetic properties is of great interest for miniaturization of RF passive components. The present work deals with the integration of YIG ferrite sputtered films for coplanar circulators. These components must work at frequenci...

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Bibliographic Details
Published in:Journal of electromagnetic waves and applications 2010-01, Vol.24 (1), p.25-32
Main Authors: Zahwe, O., Abdel Samad, B., Sauviac, B., Chatelon, J. P., Blanc Mignon, M. F., Rousseau, J. J., Le Berre, M., Givord, D.
Format: Article
Language:English
Subjects:
Engineering Sciences
Micro and nanotechnologies
Microelectronics
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Summary:The preparation of Yttrium Iron Garnet films (YIG) presenting controlled magnetic properties is of great interest for miniaturization of RF passive components. The present work deals with the integration of YIG ferrite sputtered films for coplanar circulators. These components must work at frequencies above 10 GHz, and they must be compatible with mass-production and low-cost process. The YIG films (of thickness 15 μm) are deposited on an alumina substrate by RF magnetron sputtering. Their structural mechanical and magnetic properties in the millimetre wave range are optimised to enable the film's integration. A circulator is fabricated using such prepared film, and its properties in the microwave range are characterised using a network analyzer and a probing system.
ISSN:0920-5071
1569-3937
DOI:10.1163/156939310790322073