Compact fiber-coupled three degree-of-freedom displacement interferometry for nanopositioning stage calibration

Heterodyne displacement interferometry is a widely accepted methodology capable of measuring displacements with sub-nanometer resolution in many applications. We present a compact heterodyne system capable of simultaneously measuring Z-displacement along with changes in pitch and yaw using a single...

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Bibliographic Details
Published in:Measurement science & technology 2014-07, Vol.25 (7), p.75205-10
Main Authors: Gillmer, S R, Smith, R C G, Woody, S C, Ellis, J D
Format: Article
Language:English
Subjects:
Calibration
Degrees of freedom
Displacement
displacement measuring interferometry
Interferometry
Mathematical analysis
optical metrology
optical sensors
Rotational
stage calibration
Wave fronts
Yaw
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Summary:Heterodyne displacement interferometry is a widely accepted methodology capable of measuring displacements with sub-nanometer resolution in many applications. We present a compact heterodyne system capable of simultaneously measuring Z-displacement along with changes in pitch and yaw using a single measurement beam incident on a plane mirror target. The interferometer's measurement detector utilizes differential wavefront sensing to decouple and measure these three degrees of freedom. Reliable rotational measurements typically require calibration; however, two analytical models are discussed which predict the readout of rotational scaling factors.
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/25/7/075205