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Imaging Mie ellipsometry: dynamics of nanodust clouds in an argon-acetylene plasma
For the in situ analysis of nano-sized particles in a laboratory plasma, Mie ellipsometry is a well established technique. We present a simple setup with two CCD cameras to gain online spatiotemporal resolved information of the growth dynamics of particles which are produced by plasma chemical proce...
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Published in: | Plasma sources science & technology 2012-12, Vol.21 (6), p.65005-1-7 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | For the in situ analysis of nano-sized particles in a laboratory plasma, Mie ellipsometry is a well established technique. We present a simple setup with two CCD cameras to gain online spatiotemporal resolved information of the growth dynamics of particles which are produced by plasma chemical processes in an argon-acetylene plasma. Imaging Mie ellipsometry proves to be a powerful technique to study the growth processes of nanodust in all its details. |
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ISSN: | 0963-0252 1361-6595 1361-6595 |
DOI: | 10.1088/0963-0252/21/6/065005 |