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Imaging Mie ellipsometry: dynamics of nanodust clouds in an argon-acetylene plasma

For the in situ analysis of nano-sized particles in a laboratory plasma, Mie ellipsometry is a well established technique. We present a simple setup with two CCD cameras to gain online spatiotemporal resolved information of the growth dynamics of particles which are produced by plasma chemical proce...

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Bibliographic Details
Published in:Plasma sources science & technology 2012-12, Vol.21 (6), p.65005-1-7
Main Authors: Greiner, Franko, Carstensen, Jan, Köhler, Nils, Pilch, Iris, Ketelsen, Helge, Knist, Sascha, Piel, Alexander
Format: Article
Language:English
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Summary:For the in situ analysis of nano-sized particles in a laboratory plasma, Mie ellipsometry is a well established technique. We present a simple setup with two CCD cameras to gain online spatiotemporal resolved information of the growth dynamics of particles which are produced by plasma chemical processes in an argon-acetylene plasma. Imaging Mie ellipsometry proves to be a powerful technique to study the growth processes of nanodust in all its details.
ISSN:0963-0252
1361-6595
1361-6595
DOI:10.1088/0963-0252/21/6/065005