CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2021-07, Vol.31 (7), p.74004
Main Authors: Lee, Ya-Chu, Hsieh, Meng-Lin, Lin, Pen-Sheng, Yang, Chia-Hung, Yeh, Sheng-Kai, Do, Thi Thu, Fang, Weileun
Format: Article
Language:English
Subjects:
barometer
CMOS
CMOS MEMS
environment sensor
gas sensor
humidity sensor
IR sensor
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ISSN:0960-1317
1361-6439
DOI:10.1088/1361-6439/ac0514