Interface characteristics and electrical transport of Ge/Si heterojunction fabricated by low-temperature wafer bonding

• Published in: Journal of physics. D, Applied physics Applied physics, 2018-06, Vol.51 (26), p.265306
• Main Authors: Ke, Shaoying, Ye, Yujie, Wu, Jinyong, Lin, Shaoming, Huang, Wei, Li, Cheng, Chen, Songyan
• Format: Article
• Language: English
• Subjects: amorphous Ge; Ge/Si wafer bonding; near-bubble-free; on/off ratio; oxide-layer-free
• ISSN: 0022-3727; 1361-6463
• DOI: 10.1088/1361-6463/aac7b0

We report a promising method for oxide-layer-free germanium (Ge)/silicon (Si) wafer bonding based on an amorphous Ge (a-Ge) intermediate layer between Si and Ge wafers. The effect of the exposure time (te), during which the a-Ge is exposed to the air after sputtering and being taken out of the chamber on the bubble density at the bonded interface, is identified and a near-bubble-free Ge/Si bonded interface is achieved for the te of 3 s. The crystallization of a-Ge at Ge/Si bonded interface starts from a-Ge/Ge interface and it fully turns to be single-crystal Ge after post-annealing. The oxide layer at a-Ge/a-Ge bonded interface formed by the interface hydrophilic reaction disappears due to the atom redistribution triggered by the crystallization of a-Ge. As expected, the performance of the Ge/Si heterojunction diode is significantly improved by this oxide-layer-free Ge/Si bonded interface. A low dark current of 1.6 µA, high on/off current ratio of 3.4  ×  105, and low ideality factor of 1.02 (150 K) is achieved at  −0.5 V for the bonded Ge/Si diode. Finally, the carrier transport mechanisms at Ge/Si bonded interface annealed at different temperatures are also clearly clarified.