Non-contact thin-film sheet conductance measurement based on the attenuation of low frequency electric potentials

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2021-10, Vol.54 (41), p.414003
Main Authors: Pouryazdan, Arash, Prance, Robert J, Prance, Helen, Costa, Júlio C, Münzenrieder, Niko
Format: Article
Language:English
Subjects:
electric potential
electrometer
field effect
impedance mismatch
sheet resistance
thin-films
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ISSN:0022-3727
1361-6463
DOI:10.1088/1361-6463/ac1372