High figure-of-merit A1-mode lamb wave resonators operating around 6 GHz based on the LiNbO3 thin film

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2024-07, Vol.57 (29)
Main Authors: Tong, Xin, Liu, Wenjuan, Wen, Zhiwei, Liu, Zesheng, Xu, Qinwen, Zou, Yang, Gao, Chao, Zhou, Jie, Liu, Yan, Cai, Yao, Sun, Chengliang
Format: Article
Language:English
Subjects:
figure-of-merit
lamb wave resonator
LN thin film
the first asymmetric mode
Online Access:Get full text
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ISSN:0022-3727
1361-6463
DOI:10.1088/1361-6463/ad3e06