Mitigating waveguide loss in Ge–Sb–Se chalcogenide glass photonics

Minimizing propagation loss within waveguides remains a central objective across diverse photonic platforms, impacting both linear lightwave transmission and nonlinear wavelength conversion efficiencies. Here, we present a method to mitigate waveguide loss in Ge 28 Sb 12 Se 60 chalcogenide glass, a...

Full description

Saved in:
Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2024-08, Vol.57 (30), p.305107
Main Authors: Han, Fengbo, Niu, Yunfei, Zhang, Yan, Gong, Jue, Yu, Shaoliang, Du, Qingyang
Format: Article
Language:English
Subjects:
chalcogenide glass
CMOS compatible process
thermal reflow
waveguide loss
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Minimizing propagation loss within waveguides remains a central objective across diverse photonic platforms, impacting both linear lightwave transmission and nonlinear wavelength conversion efficiencies. Here, we present a method to mitigate waveguide loss in Ge 28 Sb 12 Se 60 chalcogenide glass, a material known for its high nonlinearity, broad mid-infrared transparency, and significant potential for mid-IR photonics applications. By applying a sacrifical oxide layer to eliminate etching residues and a subsequent waveguide thermal reflow to smooth lithography-induced line edge roughness, we successfully reduced the waveguide loss down to 0.8 dB cm −1 at 1550 nm wavelength. This represents the best result in small-core and high-index-contrast Ge 28 Sb 12 Se 60 channel waveguides. Our approach paves the way for low-loss, on-chip chalcogenide photonic devices.
ISSN:0022-3727
1361-6463
DOI:10.1088/1361-6463/ad43f5