Influence of annealing temperature on the optoelectronic properties of ITZO thin films

Saved in:
Bibliographic Details
Published in:Nanotechnology 2021-10, Vol.32 (40), p.405701
Main Authors: Ding, Anning, You, Ruisong, Luo, Shulin, Gong, Jianhong, Song, Shumei, Wang, Kunlun, Dai, Bo, Sun, Hui
Format: Article
Language:English
Subjects:
annealing temperature
ITZO thin films
optoelectronic properties
RF magnetron sputtering
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0957-4484
1361-6528
DOI:10.1088/1361-6528/ac0dda