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Improvement of endurance and switching speed in Hf1−x Zr x O2 thin films using a nanolaminate structure
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Published in: | Nanotechnology 2022-07, Vol.33 (39) |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0957-4484 1361-6528 |
DOI: | 10.1088/1361-6528/ac79bb |