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Improvement of endurance and switching speed in Hf1−x Zr x O2 thin films using a nanolaminate structure

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Bibliographic Details
Published in:Nanotechnology 2022-07, Vol.33 (39)
Main Authors: Jang, Hojung, Kashir, Alireza, Oh, Seungyeol, Hwang, Hyunsang
Format: Article
Language:English
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ISSN:0957-4484
1361-6528
DOI:10.1088/1361-6528/ac79bb