Chemically detaching hBN crystals grown at atmospheric pressure and high temperature for high-performance graphene devices

• Published in: Nanotechnology 2023-11, Vol.34 (47), p.475703
• Main Authors: Ouaj, Taoufiq, Kramme, Leonard, Metzelaars, Marvin, Li, Jiahan, Watanabe, Kenji, Taniguchi, Takashi, Edgar, James H, Beschoten, Bernd, Kögerler, Paul, Stampfer, Christoph
• Format: Article
• Language: English
• Subjects: electronic transport; graphene; hexagonal boron nitride; Raman spectroscopy
• ISSN: 0957-4484; 1361-6528
• DOI: 10.1088/1361-6528/acf2a0

In this work, we report on the growth of hexagonal boron nitride (hBN) crystals from an iron flux at atmospheric pressure and high temperature and demonstrate that (i) the entire sheet of hBN crystals can be detached from the metal in a single step using hydrochloric acid and that (ii) these hBN crystals allow to fabricate high carrier mobility graphene-hBN devices. By combining spatially-resolved confocal Raman spectroscopy and electrical transport measurements, we confirm the excellent quality of these crystals for high-performance hBN-graphene-based van der Waals heterostructures. The full width at half maximum of the graphene Raman 2D peak is as low as 16 cm −1 , and the room temperature charge carrier mobilitiy is around 80 000 cm 2 /(Vs) at a carrier density 1 × 10 12 cm −12 . This is fully comparable with devices of similar dimensions fabricated using crystalline hBN synthesized by the high pressure and high temperature method. Finally, we show that for exfoliated high-quality hBN flakes with a thickness between 20 and 40 nm the line width of the hBN Raman peak, in contrast to the graphene 2D line width, is not useful for benchmarking hBN in high mobility graphene devices.