Corrigendum: Extended scaling and Paschen law for micro-sized radiofrequency plasma breakdown (2017 Plasma Sources Sci. Technol. 26 034003)

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Bibliographic Details
Published in:Plasma sources science & technology 2017-04, Vol.26 (5), p.59502
Main Authors: Lee, Min Uk, Lee, Jimo, Lee, Jae Koo, Yun, Gunsu S
Format: Article
Language:English
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ISSN:0963-0252
1361-6595
1361-6595
DOI:10.1088/1361-6595/aa6771