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Kinetic investigation of the planar multipole resonance probe in the low-pressure plasma

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Bibliographic Details
Published in:Plasma sources science & technology 2021-10, Vol.30 (10), p.105011
Main Authors: Wang, Chunjie, Friedrichs, Michael, Oberrath, Jens, Brinkmann, Ralf Peter
Format: Article
Language:English
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ISSN:0963-0252
1361-6595
DOI:10.1088/1361-6595/ac27bb