Piezo-actuated adaptive prisms for continuously adjustable bi-axial scanning

We present two piezo-actuated adaptive prisms with apertures of 8 mm based on a bi-axial continuously tiltable glass window on top of an optical fluid, enabling fast scanning applications in a compact, linear axial design. One prism with a device size of 58 by 51 mm is optimized for scan angles of ±...

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Bibliographic Details
Published in:Smart materials and structures 2020-09, Vol.29 (9), p.95004
Main Authors: Lemke, Florian, Weber, Pascal M, Philipp, Katrin, Czarske, Jürgen W, Koukourakis, Nektarios, Wallrabe, Ulrike, Wapler, Matthias C
Format: Article
Language:English
Subjects:
bi-axial scanning
fast transmissive scanning
piezo actuation
transmissive beam steering
tunable prism
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Summary:We present two piezo-actuated adaptive prisms with apertures of 8 mm based on a bi-axial continuously tiltable glass window on top of an optical fluid, enabling fast scanning applications in a compact, linear axial design. One prism with a device size of 58 by 51 mm is optimized for scan angles of ±6.4° and response times of 2.5 ms. A second compact prism uses spiral-shaped actuators to achieve a reduced device diameter of 33 mm at slightly compromised maximum scan angles of ±4.0° with response times of approximately 4 ms. We show the design and FEM-based optimization of the prisms, their fabrication and the characterization of the scan angles and of the dynamic behavior. Finally, we also demonstrate the linearity of the system and discuss a simple control model.
ISSN:0964-1726
1361-665X
DOI:10.1088/1361-665X/ab8a00