Simulation study of organosilicon coating of a spherical nanoparticle immersed in a low-pressure HMDSO/O2 plasma

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Bibliographic Details
Published in:Physica scripta 2023-12, Vol.98 (12)
Main Authors: Rayatnia, M, Foroutan, G
Format: Article
Language:English
Subjects:
HMDSO plasma
nanoparticle coating
organosilicon thin films
plasma-fluid simulations
Online Access:Get full text
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ISSN:0031-8949
1402-4896
DOI:10.1088/1402-4896/ad0e4f