A 10 × 10 deep ultraviolet light-emitting micro-LED array

• Published in: Journal of semiconductors 2022-06, Vol.43 (6), p.62801-60
• Main Authors: Yu, Huabin, Memon, Muhammad Hunain, Jia, Hongfeng, Zhang, Haochen, Tian, Meng, Fang, Shi, Wang, Danhao, Kang, Yang, Xiao, Shudan, Long, Shibing, Sun, Haiding
• Format: Article
• Language: English
• Subjects: AlGaN; deep ultraviolet; light extraction efficiency; micro-LED array
• ISSN: 1674-4926; 2058-6140
• DOI: 10.1088/1674-4926/43/6/062801

In this work, we design and fabricate a deep ultraviolet (DUV) light-emitting array consisting of 10 × 10 micro-LEDs ( μ -LEDs) with each device having 20 μ m in diameter. Strikingly, the array demonstrates a significant enhancement of total light output power by nearly 52% at the injection current of 100 mA, in comparison to a conventional large LED chip whose emitting area is the same as the array. A much higher (~22%) peak external quantum efficiency, as well as a smaller efficiency droop for μ -LED array, was also achieved. The numerical calculation reveals that the performance boost can be attributed to the higher light extraction efficiency at the edge of each μ -LED. Additionally, the far-field pattern measurement shows that the μ -LED array possesses a better forward directionality of emission. These findings shed light on the enhancement of the DUV LEDs performance and provide new insights in controlling the light behavior of the μ -LEDs.