Silicon optrode array with monolithically integrated SU-8 waveguide and single LED light source

• Published in: Journal of neural engineering 2022-08, Vol.19 (4), p.46013
• Main Authors: Ryu, Daeho, Lee, Youjin, Lee, Yongseung, Lee, Yena, Hwang, Seoyoung, Kim, Yong-Kweon, Jun, Sang Beom, Lee, Hyang Woon, Ji, Chang-Hyeon
• Format: Article
• Language: English
• Subjects: LED; MEMS; optogenetics; silicon optrode; SU-8 waveguide
• ISSN: 1741-2560; 1741-2552
• DOI: 10.1088/1741-2552/ac7f5f

Objective . This paper presents a conventional light emitting diode (LED) and polymer waveguide coupled silicon optrode array. Approach . Unique lens design at the waveguide inlet enables a high light coupling efficiency with a single LED light source, and provides small power consumption compatible with a wireless optogenetic neuromodulation system. To increase the light intensity at the waveguide tip, a lensed waveguide is fabricated with epoxy-based photoresist SU-8, which has a plano-convex lens shape at the waveguide inlet to focus the light in the horizontal direction. In addition, a cylindrical lens is assembled in front of the waveguide inlet to focus the source light in the vertical direction. Main results . The glass cylindrical lens and SU-8 plano-convex lens increased the light coupling efficiency by 6.7 dB and 6.6 dB, respectively. The fabricated 1 × 4 array of optrodes is assembled with a single LED with 465 nm wavelength, which produces a light intensity of approximately 2.7 mW mm −2 at the SU-8 waveguide outlet when 50 mA input current is applied to the LED. Each optrode has four recording electrodes at the SU-8 waveguide outlet. The average impedance of the iridium oxide (IrO x ) electroplated recording electrodes is 43.6 kΩ. Significance . In-vivo experiment at the hippocampus region CA1 and CA2 demonstrated the capability of optical stimulation and neural signal recording through the LED and SU-8 waveguide coupled silicon optrode array.