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Distribution profiles of radiation donor defects in arsenic-implanted HgCdTe films
Mobility spectrum analysis and step-by-step chemical etching-based depth profiling have been employed for establishing distribution profiles of radiation-induced donor defects in an arsenic-implanted HgCdTe film grown by molecular beam epitaxy. Three electron species associated with specific defect...
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Published in: | Journal of physics. Conference series 2018-11, Vol.1115 (3), p.32063 |
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Main Authors: | , , , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | Mobility spectrum analysis and step-by-step chemical etching-based depth profiling have been employed for establishing distribution profiles of radiation-induced donor defects in an arsenic-implanted HgCdTe film grown by molecular beam epitaxy. Three electron species associated with specific defect layers in implanted material were detected, and defects responsible for these species were identified. The advantage of mobility spectrum analysis methodology over the use of traditional differential Hall effect-measurements with a single value of magnetic field was demonstrated for the ion-implanted HgCdTe. |
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ISSN: | 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/1115/3/032063 |