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Grazing Incidence X-Ray Diffraction using Synchrotron Light at SLRI
This work demonstrates the capability of the grazing incidence X-ray diffraction technique using synchrotron light. The measurement system is set up at the BL7.2W:MX beamline of the Synchrotron Light Research Institute (SLRI). The beamline utilizes hard X-rays from a 6.5-Tesla Superconducting Wavele...
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Published in: | Journal of physics. Conference series 2018-12, Vol.1144 (1), p.12052 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | This work demonstrates the capability of the grazing incidence X-ray diffraction technique using synchrotron light. The measurement system is set up at the BL7.2W:MX beamline of the Synchrotron Light Research Institute (SLRI). The beamline utilizes hard X-rays from a 6.5-Tesla Superconducting Wavelength Shifter. The photon energy can be chosen between 7 to 18 keV with a photon flux of more than 1010 photons/sec at 100mA stored electron beam. The X-ray beam size can be reduced down to 20 microns, allowing XRD measurements in grazing geometry, thus crystal structures of very thin films with a thickness of tens nanometers can be identified. The diffraction patterns are recorded with a 2D CCD detector, allowing more diffraction spots of single crystalline films to be recorded. |
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ISSN: | 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/1144/1/012052 |