Determination of the threshold sensitivity of a deposited dielectric film thickness control method based on surface plasmon resonance effect

The lower boundaries of the real time measuring range of the dielectric film thickness on the sensor surface, the principle of which is based on the effect of the excitation of surface electromagnetic waves (SEW), are determined. The simulation was performed for materials with high and low refractiv...

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Bibliographic Details
Published in:Journal of physics. Conference series 2019-09, Vol.1313 (1), p.12033
Main Authors: Komlev, A E, Dyukin, R V, Shutova, E S
Format: Article
Language:English
Subjects:
Control methods
Electromagnetic radiation
Film thickness
Physics
Refractivity
Surface plasmon resonance
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Summary:The lower boundaries of the real time measuring range of the dielectric film thickness on the sensor surface, the principle of which is based on the effect of the excitation of surface electromagnetic waves (SEW), are determined. The simulation was performed for materials with high and low refractive index.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1313/1/012033