Low temperature plasma-assisted nitriding of austenitic steel in a ferromagnetic enhanced inductive discharge

Plasma-assisted nitriding of austenitic stainless steel AISI 321 has been performed with the use of a ferromagnetic enhanced inductive discharge as the source of nitrogen ions and radicals, in the temperature range of 300-400°C, gas pressure of 50 mTorr and ion densities of about (2.5-7.7)·1010 cm−3...

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Bibliographic Details
Published in:Journal of physics. Conference series 2019-11, Vol.1382 (1), p.12153
Main Author: Isupov, M V
Format: Article
Language:English
Subjects:
Austenitic stainless steels
Discharge
Ferromagnetism
Gas pressure
Inductively coupled plasma
Low temperature
Nitriding
Nitrogen ions
Physics
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Summary:Plasma-assisted nitriding of austenitic stainless steel AISI 321 has been performed with the use of a ferromagnetic enhanced inductive discharge as the source of nitrogen ions and radicals, in the temperature range of 300-400°C, gas pressure of 50 mTorr and ion densities of about (2.5-7.7)·1010 cm−3. A significant increase in the nitriding rate was achieved, in comparison with a low temperature glow-discharge nitriding process. A possible mechanism of the nitriding rate increase is a high atomic nitrogen density achieved in the ferromagnetic enhanced inductively coupled plasma.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1382/1/012153