Magnetron sputtering system with reactive plasma assisting for deposition of TixZr1-xO2 coating resistant to laser radiation

The magnetron sputtering system with reactive oxygen plasma assisting for deposition of TixZr1-xO2 nanocomposite coatings by sputtering a single Ti-Zr target and the results of study of the stability of these coatings to the action of high-power laser radiation are presented. The periodically repeat...

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Bibliographic Details
Published in:Journal of physics. Conference series 2019-11, Vol.1396 (1)
Main Authors: Volpian, O D, Krikunov, A I, Kuzmichev, A I, Zharikova, E S, Churikov, D V
Format: Article
Language:English
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Summary:The magnetron sputtering system with reactive oxygen plasma assisting for deposition of TixZr1-xO2 nanocomposite coatings by sputtering a single Ti-Zr target and the results of study of the stability of these coatings to the action of high-power laser radiation are presented. The periodically repeated sequential processes of applying sputtered material onto a substrate and oxidation of the deposited material have been realized for obtaining the optical coating with resistance to the 960 W/cm2 laser radiation.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1396/1/012044