Design and performance of NiCr-based micro-heater with lower excitation energy

Low energy and miniaturization are two main development directions for the MEMS (Micro-Electro-Mechanical System)-based initiator. The MEMS-based initiators or called fire components were fabricated by the way of that the secondary explosive charges were coated or synthetized with in-situ method ont...

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Bibliographic Details
Published in:Journal of physics. Conference series 2020-03, Vol.1507 (2), p.22015
Main Authors: Liu, W, Su, Q, Xue, Y, Xie, R Zh, Ren, X M, Liu, L
Format: Article
Language:English
Subjects:
Electric potential
Initiators
Microelectromechanical systems
Miniaturization
Physics
Silicon substrates
Thickness
Voltage
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Summary:Low energy and miniaturization are two main development directions for the MEMS (Micro-Electro-Mechanical System)-based initiator. The MEMS-based initiators or called fire components were fabricated by the way of that the secondary explosive charges were coated or synthetized with in-situ method onto the NiCr-based micro-heater surface. The firing voltage experiments of the fire component under capacity loading were performed. The fire voltages of the fire components with rectangle micro-heater increase linearly with the increasing of micro-heater's width, and decrease with the increasing of micro-heater's thickness. The fire voltages of the fire components with Pyrex7740 substrate cut down to 50%, compared to the fire component with silicon substrate. The fire component with lower explosive density contributes to reduce the fire voltage. The micro-heater with parallel connection structure or called parallel micro-heaters cannot have lower fire voltage than the single micro-heater, but have more reliability to initiate the secondary explosive.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1507/2/022015