Gas-discharge plasma diagnostics by a continuous spectrum of optical radiation

In the present work, plasma diagnostics method based on the measurement and theoretical analysis of continuous emission spectrum of a gas discharge was discussed. Using the method, electron temperatures of a DC glow discharge and ferromagnetic enhanced inductive discharge were determined for inert g...

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Bibliographic Details
Published in:Journal of physics. Conference series 2020-11, Vol.1677 (1), p.12146
Main Authors: Pinaev, V A, Isupov, M V
Format: Article
Language:English
Subjects:
Electron energy
Emission analysis
Ferromagnetism
Gas discharges
Gas pressure
Gases
Glow discharges
Helium
Mathematical analysis
Optical radiation
Physics
Plasma diagnostics
Rare gases
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Summary:In the present work, plasma diagnostics method based on the measurement and theoretical analysis of continuous emission spectrum of a gas discharge was discussed. Using the method, electron temperatures of a DC glow discharge and ferromagnetic enhanced inductive discharge were determined for inert gases in the gas pressure range of 20-200 Pa. Experimental results were compared with the results of numerical calculations for the ferromagnetic enhanced inductive discharge and DC glow discharge. A satisfactory agreement between the optically measured and numerically calculated values of electron temperature was shown.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1677/1/012146