Current-voltage characteristics of an impulse magnetron discharge in target material vapor

The magnetron discharge with hot (uncooled) target in an impulse mode has been experimentally investigated. The I-V characteristics have been measured depending on the magnetic field strength for three target materials: copper, chromium, and silicon. For melted copper and hot chromium targets, stabl...

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Bibliographic Details
Published in:Journal of physics. Conference series 2020-12, Vol.1686 (1), p.12019
Main Authors: Kaziev, Andrey V., Leonova, Kseniia A., Kharkov, Maksim M., Tumarkin, Alexander V., Kolodko, Dobrynya V., Khomyakov, Andrey Yu, Ageychenkov, Dmitriy G.
Format: Article
Language:English
Subjects:
Argon
Chromium
Copper
Current voltage characteristics
Discharge
Field strength
Magnetic fields
Physics
Silicon
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Summary:The magnetron discharge with hot (uncooled) target in an impulse mode has been experimentally investigated. The I-V characteristics have been measured depending on the magnetic field strength for three target materials: copper, chromium, and silicon. For melted copper and hot chromium targets, stable gasless (no argon) operation of the magnetron has been demonstrated with maximum impulse power densities about 2.5 kW/cm2 (averaged over the racetrack area). For silicon target, maximum impulse power density was 1.5 kW/cm2 at low argon pressure (0.1 Pa). The magnetic field dependences of discharge parameters have shown the associated changes in differential plasma impedance.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1686/1/012019