Study of the influence of the substrate material on the phase composition and thickness of Ti-Pb coatings deposited by a magnetron

The structure of coatings deposited by reactive magnetron sputtering of Ti and Pb cathodes on substrates from Mo, 30HGSA and 304 steel was studied by X-ray diffraction. The thickness of the coatings was determined by the difference between the CTE of the coating and the substrate, which is maximum f...

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Bibliographic Details
Published in:Journal of physics. Conference series 2020-12, Vol.1713 (1), p.12027
Main Authors: Lozovan, A A, Betsofen, S Ya, Lyakhovetsky, M A, Pavlov, Yu S, Grushin, I A, Lebedev, M A, Sukhova, T S, Kubatina, E P
Format: Article
Language:English
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Summary:The structure of coatings deposited by reactive magnetron sputtering of Ti and Pb cathodes on substrates from Mo, 30HGSA and 304 steel was studied by X-ray diffraction. The thickness of the coatings was determined by the difference between the CTE of the coating and the substrate, which is maximum for Mo coating and minimum for 304 steel, for which the thickest coating was found, consisting of tetragonal modifications of PbO.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1713/1/012027