Loading…
Investigation of the plasma composition of a discharge with a self-heating hollow cathode and an active anode in a gas mixture with titanium and hexamethyldisilazane vapors
The analysis of composition of low-pressure (~0.1-1 mTorr) hollow cathode arc plasma in Ar+N2 gas mixture with Ti+hexamethyldisilazane vapors was carried out by optical emission spectroscopy. The influence of HMDS flow rate (1-10 g/h), discharge current (10-50 A) and Ti-vapors flow on hexamethyldisi...
Saved in:
Published in: | Journal of physics. Conference series 2021-11, Vol.2064 (1), p.12046 |
---|---|
Main Authors: | , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | The analysis of composition of low-pressure (~0.1-1 mTorr) hollow cathode arc plasma in Ar+N2 gas mixture with Ti+hexamethyldisilazane vapors was carried out by optical emission spectroscopy. The influence of HMDS flow rate (1-10 g/h), discharge current (10-50 A) and Ti-vapors flow on hexamethyldisilazane decomposition degree and plasma composition and was investigated. The proposed plasma activation method provides both an intense flow and a high activation degree of metal vapors, and a sufficient decomposition degree of precursor vapors for the formation of solid TiSiCN coatings at a high deposition rate. Test coatings with a thickness of 6 microns and a hardness of 31 GPa were obtained in 1 hour at 400ºC. |
---|---|
ISSN: | 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/2064/1/012046 |