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Realization of a Cost-Effective Deformable Grating for the Extreme-Ultraviolet
The application of a deformable grating to the realization of a time delay compensated monochromator is presented. The grating is realized as a replica on a thin glass substrate and the deformation is realized with a mechanical bender. The monochromator is conceived for the spectral selection of a s...
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Published in: | Journal of physics. Conference series 2022-12, Vol.2380 (1), p.12058 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | The application of a deformable grating to the realization of a time delay compensated monochromator is presented. The grating is realized as a replica on a thin glass substrate and the deformation is realized with a mechanical bender. The monochromator is conceived for the spectral selection of a single harmonic in the spectral range 20-80 nm in beamlines exploiting the high harmonic generation process. A possible optical design requiring only two deformable gratings, a mirror and an intermediate slit is presented. |
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ISSN: | 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/2380/1/012058 |